![]() Device and method of applying force to an object (Machine-translation by Google Translate, not legal
专利摘要:
Device and method of applying force to an object; comprising the use of a force application element (2) to contact a region (p) of the object (5); an elastic element (6) associated with said force application element (2), causing the deformation of said elastic element (6) causing the creation of a first force proportional to said deformation; and a magnetic element (10, 11) associated with said force application element (2), said magnetic element including at least two parts (10, 11) that interact magnetically with each other, said interaction causing the creation of a second force. An increase in the first force corresponds to a decrease in the second force and a decrease in the first force corresponds to an increase in the second force. (Machine-translation by Google Translate, not legally binding) 公开号:ES2603655A1 申请号:ES201630506 申请日:2016-04-21 公开日:2017-02-28 发明作者:Carles COLLDELRAM PEROLIU;Josep NICOLAS ROMAN;Claude RUGET 申请人:Consorci per a la Construccio Equipament i Explotacio del Laboratori de Llum Sincrotro; IPC主号:
专利说明:
DESCRIPTION Device and method of applying force on an object Object of the invention. 5 The present invention relates to a device and a method of applying force to an object in a precise and stable manner. Background of the invention. 10 Force application devices are known which are used to apply a force in a controlled and precise manner on an object in order to control as accurately as possible the reaction of said object to the application of said force, for example, deformation or displacement of it. fifteen For example, in the field of devices for curving mirrors used in particle accelerators, which constitutes the preferred field of application of the device and of the method of the present invention, it is known to use force application devices to apply a force at a location determined from a mirror. The application of said force deforms the mirror in said location to correct as far as possible possible dimensional deviations with respect to the ideal surface or surface errors present in said mirror after its production. This deformation allows to improve the quality of a beam of light reflected by the mirror. 25 The force must be applied with the maximum possible resolution, in order to control the deformation caused in the mirror as accurately as possible. The use of force application devices comprising a force applicator element in contact with the location of the mirror to be deformed and a drive element that transmits the force to the force applicator element is known. Between the applicator element and the actuator element there is a spring that allows to improve the resolution of the force application in the mirror. 35 The interposition of the pier allows to obtain a more progressive transition in the changes of the force applied in the mirror. For example, if the drive element is a spindle and nut mechanism and the force is transmitted directly and rigidly to the applicator element by the nut that travels along the spindle, the resolution of the force application of the device will be limited by the minimum angle of rotation of the motor that drives the spindle and displaces the nut. If a spring is arranged between the nut and the applicator element, so that the spring deforms correspondingly with the displacement of the nut, the spring will allow the force of the nut to be transmitted to the applicator element more progressively, absorbing the displacement 'staggered' of the nut. 10 A problem with this type of force application devices is the poor or limited repeatability of the force applied therewith when it is necessary to separate the force application device from the mirror. Because the mirrors must be transported from one location to another (from a metrology bench to the particle accelerator, or even to a different installation) it is necessary to unlink the force application device with respect to the mirror during transport, it is that is, to separate the force applicator element from the mirror, in order to avoid possible damage to the mirror due to impacts or sudden movements during transport. twenty Separating the force applicator from the mirror implies that the position of the contact point between the two elements when brought back into contact can vary in a range of a few tenths of a millimeter. This variation in the position of the contact point between the force applicator and the mirror causes the movement of said force applicator and a variation in the elongation of the spring. This elongation of the spring will cause the force applied by the spring to also change, since the force applied by the spring depends on its elongation (Hooke's law). Thus, it is possible that the force applied by the spring in the mirror when the force applicator is brought back into contact with the mirror is different from the force applied by the spring before separating the device from the mirror, being by therefore the deformation induced in the mirror after separation other than the deformation induced before said separation. The objective of the present invention is to provide a device and method that compensate for the variation of the force applied by an elastic element (spring) due to a displacement of the position of the contact point. between the force application device and the object on which the force is applied. In this way, the force application device will exert the same force on an object regardless of the change of position of said contact point. This will prevent, for example, having to calibrate or adjust the force application device each time the position of the point of contact with the object changes. 5 Description of the invention The objective of the present invention is to solve the drawbacks of the devices known in the art. In a first aspect, a force application device is disclosed in an object, comprising: -A force application element to contact an area of the object; An elastic element associated with said force application element, causing the deformation of said elastic element to create a first force proportional to said deformation and which is applied to said force application element; characterized by the fact that it also comprises: 20 - a magnetic element associated with said force application element, said magnetic element including at least two parts that interact magnetically with each other, said interaction causing the creation of a second force that is applied in the force application element; 25 and wherein the force application element is mobile in response to a variation of the position of the contact point between said force application element and the object, said movement causing deformation of the elastic element and modification of the interaction between said at least two parts of the magnetic element, so that an increase in the first force corresponds to a decrease in the second force and a decrease in the first force corresponds to an increase in the second force. The force created by the magnetic interaction of the parts of the magnetic element 35 is added to the force generated by the deformation of the elastic element, so that, as will be explained below, it is possible to create a zone of stability in which the sum of the variations of the two forces is minimal in a given range of displacement of the point of application of the force on the object. That is, by working in this zone of stability, it will be possible to achieve that the sum of the variations of the forces exerted by the elastic element and by the magnetic element 5 is substantially zero regardless of the deformation of the elastic element. This makes it possible to eliminate variations in the application of force due to changes in the position of the contact point between the force application device and the object in which the force is applied. 10 According to an embodiment of the invention, the elastic element is a coil spring that works under tension. Advantageously, the at least two parts that interact magnetically with each other comprise a pair of moving magnets with each other and arranged in mutual attraction. fifteen Also advantageously, the movement of the force application element in one direction causes the spring to stretch and the distance between the pair of magnets and the movement of the force application element in the opposite direction causes the spring to contract and the approach between the pair of magnets. twenty Advantageously, the force application element is a swing arm comprising two ends on each side of an articulation point, said arm being in contact with the object at one end and being connected to the elastic element and the magnetic element by the opposite end. . 25 Thanks to this configuration, when the spring is stretched and the force exerted by it increases, the magnets of the magnetic element move away, so that the force of attraction between both magnets decreases. Also, when the spring contracts and decreases the force exerted by it, the magnets approach, so that the force of attraction between them increases. This compensation between both forces allows to create the stability zone in which the sum of the variations of both forces is minimal in a given range of displacement or deformation of the spring. 35 Preferably, the device of the present invention comprises means of controlled deformation of the elastic element. Also preferably, the device of the present invention comprises means for adjusting the mutual position between the at least two parts that interact magnetically with each other. 5 It is possible to modify the deformation of the spring to apply more or less force on the object on which the force is applied. Likewise, it is also possible to adjust the mutual position between the parts that interact magnetically with each other to adjust the desired stability zone during the application of force on an object. 10 In a second aspect, a method of applying force on an object is disclosed, comprising: - have a force application element to contact an area of the object; - disposing an elastic element associated with said force application element, causing the deformation of said elastic element creating a first force proportional to said deformation and which is applied in said force application element; characterized by the fact that it also comprises: - disposing a magnetic element associated with said force application element, said magnetic element including at least two parts that interact magnetically with each other, said interaction causing the creation of a second force that is applied in the force application element; and modifying the interaction between said at least two parts of the magnetic element 30 in correspondence with a deformation of the elastic element due to the movement of the force application element caused by a variation of the position of the contact point between the force application element and the object, so that an increase in the first force corresponds to a decrease in the second force and a decrease in the first force corresponds to an increase in the second force. According to one embodiment of the method, the elastic element is a helical spring that works under tension. Advantageously, in the method, the at least two parts that interact magnetically with each other comprise a pair of movable magnets with each other and arranged in mutual attraction. Also advantageously, in the method, the movement of the force application element in one direction causes the spring to stretch and the distance between the pair of magnets and the movement of the force application element in the opposite direction causes the spring to contract and the approach between the pair of magnets. Preferably, in the method, the force application element is a swing arm comprising two ends on each side of an articulation point, said arm being in contact with the object at one end and being connected to the elastic element and the element. magnetic at the opposite end. Description of the figures. In order to facilitate the description of what has been stated above, some drawings are attached in which, schematically and only by way of non-limiting example, a practical case of realization of the invention is represented, in which: Figure 1 is a schematic view of an illustrative embodiment of the force application device of the present invention; Figure 2 is an illustrative graph showing the stabilization effect on the force application that allows obtaining the device and the method of the present invention; 30 Figure 3 is another schematic view like the one in Figure 1 in which relative positions used in calculations performed for the device and the method of the present invention are shown. 35 Description of a preferred embodiment An embodiment of the force application device of the present invention is shown in Figure 1. In this case, the device consists of a device for curving mirrors, especially mirrors used in particle accelerators. 5 The device comprises a frame 1 that rotatably supports a swing arm 2 articulated to the frame 1 in its central part through a joint 3. In this way, the swing arm 2 can oscillate in the directions indicated by the arrows A. The tilting arm 2 comprises at one of its ends a contact element 10 4 designed to contact an object in which a force will be applied by means of the device. In this case, the object is a mirror 5 (shown in cross section), and the element 4 contacts the lower surface of said mirror 5 at a contact point P to bend it in the area adjacent to that point P. fifteen The swing arm 2 is attached in the area adjacent to its other end to a pair of elements that will be described below. The first element consists of a coil spring 6 that works on traction, that is, it is stretched at all times in an operative state. The spring 6 is connected by its upper end 20 to the swing arm 2 and is connected by its lower end to a nut 7 that is screwed to a spindle 8 that extends vertically and is associated with a motor 9 fixed to the frame 1. Al If activated, the motor 9 rotates the spindle 8 about its longitudinal axis in one direction or another, as desired. The rotation of the spindle 8 in one direction or another causes the nut 7 to move downwards or upwards and, therefore, causes the lower end of the spring 6 to move downwards or upwards correspondingly. The second element consists of a magnetic element that comprises a pair of magnets 10, 11 separated vertically and that attract each other. The first magnet 10 30 is attached to the swing arm 2, and the second magnet 11 is attached to a nut 12 that is screwed to a spindle 13 that extends vertically and that is associated with a motor 14 fixed to the frame 1. When activated , the motor 14 rotates the spindle 13 about its longitudinal axis in one direction or another, as desired. The rotation of the spindle 13 in one direction or another causes the displacement of the nut 12 35 downwards or upwards and, therefore, causes the displacement of the magnet 11 downwards or upwards correspondingly and, thus, in distancing or approaching with respect to the magnet 10. The function of this magnetic element and its details will be explained in more detail later. 5 As mentioned above, the spring 6 is in the stretched state in the operative state, so that it pulls down the end to the left in the figure of the tilting bar 2. When the nut 7 moves down, the spring 6 stretches further and pulls down with more force from the swinging bar 10. When the nut 7 moves upwards, the spring 6 stretches less and pulls down with less force from the tilting bar 2. The force exerted by the spring 6 on the tilt bar 2 tends to rotate the bar counterclockwise (in the figure) around the joint 3. Therefore, the tilt bar 2 and the contact element 4 will exert a force directed towards above 15 on the lower surface of the mirror 5 whose intensity will depend on how stretched the spring 6 is. As mentioned above, the spring 6 makes it possible to compensate for the resolution limitation imposed by the minimum rotation angle of the motor 9. 20 When the force application device of the invention is detached from the mirror 5, that is, when the mirror 5 is separated from the tilting bar 2 and the contact element 4, for example, to transport the mirror, it is necessary to arrange again the tilting bar 2 and the element 4 in contact with the lower surface 25 of the mirror 5 to reapply force on the mirror 5. It is possible that the position of the contact point P between the element 4 and the mirror 5 when placed in contact again changes. This change of position of the contact point P causes a displacement of the tilting bar 2 with respect to its position before separating it from the mirror 5. This displacement, which will consist of a rotation of the bar 2 clockwise or counterclockwise , depending on whether the change in position of the contact point P is down or up, respectively, will also cause the spring 6 attached to the bar 2 to stretch or contract with respect to its position before separating the mirror 5. 35 This change in the elongation of the spring 6 will cause the force applied by the spring 6 on the bar 2 and, therefore, on the mirror 5, to change, since the spring behaves according to Hooke's law, that is, the The force it applies depends on its degree of deformation or stretching. Therefore, it will be necessary to adjust the force application device to ensure that the spring 6 applies the same force as 5 before separating the mirror 5 from the device. The magnetic element 10, 11 described above makes it possible to effectively avoid or compensate for the effect of varying the degree of stretching of the spring 6 in the application of force in the mirror 5 in cases such as the one described above, in which the mirror 5 it is disconnected from the force application device and subsequently linked to it again. As explained above, the magnet 10 is attached to the swing arm 2 and the magnet 11 is attached to the nut 12. When the force application device 15 is working to apply a force in a controlled manner in the mirror 5, the nut 12 is in a fixed position, so that magnet 11 is also in a fixed position. The two magnets 10, 11 attract each other and are separated by a certain distance in their closest position. This separation distance can be regulated by the motor 14, the spindle 13 and the nut 12, as mentioned above. The function of this mechanism is explained below. The attraction between the two magnets 10, 11 causes the magnet 10 to be attracted by the magnet 11 downwards, exerting a force directed downwards on the tilting bar 2 25 which tends to turn said bar 2 in an anti-clockwise direction. The magnetic force of attraction between the two magnets is inversely proportional to a power of the distance that separates them. Thus, as is known, the force that the magnet 10 exerts on the bar 2 will increase the closer it gets to the magnet 11 and will decrease the further it moves away from it. In other words, the rotation of the bar 2 in 30 clockwise direction will remove the magnets 10, 11 and will cause the force exerted by the magnets 10, 11 on the bar 2 to decrease, and the rotation of the bar 2 counterclockwise will approach the magnets 10, 11 and will cause the force exerted by the magnets 10, 11 on the bar 2 to increase. 35 Therefore, in a situation like the one described above, in which the device The force application of the invention is detached from the mirror 5 and rejoined thereto, a change of position of the contact point P that causes a displacement of the bar 2 by turning it clockwise or counterclockwise will also cause the magnet 10 exerts a smaller or greater force on the bar 2, respectively. 5 As is evident, this force of attraction of the magnets 10, 11 on the bar 2 is added to the force exerted by the spring 6 on said bar 2. Reference is also made below to the graph of Figure 2. In said graph 10 the relationship between the displacement between the magnets 10, 11 and the force exerted by the attraction of said magnets 10, 11 (curve m) and the relationship can be observed between the displacement (stretching) of the spring 6 and the force exerted by it (straight s). The X axis of the graph corresponds to the displacement D and the Y axis corresponds to the force F (arbitrary units). fifteen As can be seen in the graph, the spring 6 behaves according to Hooke's law, that is, the relationship between the force that is capable of exerting the spring and the degree of deformation thereof is directly proportional. In this case, a greater stretching of the spring 6 corresponds to a greater force exerted by it (straight s). In contrast, the magnetic force of attraction between the two magnets 10, 11 is inversely proportional to a power of the distance that separates them. A greater separation between the magnets 10, 11 implies a lower force of attraction, and a smaller separation implies a greater force of attraction (curve m). As mentioned above, the total force applied on the tilting bar 2 is the sum of the attraction force of the magnets 10, 11 and the force exerted by the spring 6. 30 The sum of both forces is represented on the graph by the t curve. As can be seen, the curve t has a section in which the variation of the force applied by the spring 6 and the magnets 10, 11 is practically zero in a relatively wide displacement interval E. That is, the incorporation of Magnetic element 10, 11 in the device of the present invention makes it possible to compensate for variations in the force applied by the spring 6 in a given displacement or stretching interval E of said spring 6 caused by the variation of the position of the contact point P. 5 The graph shows the variation of the force applied in the displacement interval E only with the spring (dFs) and with the incorporation of the magnetic element (dFt). The difference between both variations is evident. This means that, if the contact point P of the tilting bar 2 with the mirror 5 10 changes position, the corresponding change in the position of the bar 2 and the degree of stretching of the spring 6 will not imply a significant change in the force total applied by the spring 6 and the magnets 10, 11 on the bar 2 and on the mirror 5 provided that the displacement or stretching of the spring 6 is within the range E. 15 Therefore, the incorporation of the magnetic element 10, 11 allows to eliminate the variations of the force applied in the mirror 5 due to changes in the position of the point of contact P between the mirror 5 and the force application device. twenty It is possible to adjust the position of the stabilization offset interval E depending on the needs. For example, the optimum displacement interval E will be different depending on the rigidity of the spring 6 or the power of the magnets 10, 11. The way to adjust the position of the interval E is to adjust the separation between the magnets 10, 11 by the mechanism formed by the motor 14, 25 the spindle 13 and the nut 12. Once the optimum displacement interval E has been established in which the variations in the total force applied are minimal, said interval will remain valid regardless of the forces applied with the spring 6 when stretched to a greater or lesser extent by means of the nut 7. For example, in the embodiment described for the application of force in particle accelerator mirrors, the optimum displacement range E will correspond to a maximum variation of the total applied force of 0.02 N. The configuration of the force application device of the invention, as well as the various elements of said device, may be different from that shown in the described embodiment. Although the elastic element shown above consists of a coil spring 6 5 that works under tension, said elastic element could have another configuration. For example, it could consist of a spring that works under compression. However, it is preferable to use a spring that works on traction, since it allows to obtain a more stable force application. The elastic element can be of any type, provided that its behavior is governed by Hooke's law. 10 Likewise, the magnetic element 10, 11 may also have different configurations than the one described above. For example, magnets 10, 11 could be arranged in mutual repulsion. In the same way as in the case of the spring 6, it is preferable that the magnets 10, 11 be arranged in mutual attraction, since this arrangement allows a more stable application of force to be obtained. In another configuration, the magnetic element 10, 11 could be arranged between the tilting bar 2 and the spring 6, with the magnet 10 attached to the bar 2 and to an upper end of the spring 6 through a support, and with the magnet 11 fixed to the frame 1. In 20 this case it would also be possible to adjust the position of the magnet 11 with respect to the magnet 10. On the other hand, the force application element 2, which in the preferred embodiment described consists of a swing arm 2, could consist of any other element of a different type depending on the specific needs or applications. For example, in an alternative embodiment, the force application element 2 could simply consist of an element similar to the contact element 4 directly associated with the spring 6 and / or the magnets 10, 11, with the spring 6 working under compression. 30 In addition, the force application element 2 could be part of the elastic element 6 or the magnetic element 10, 11 or be integrated therein. It is possible to dispense with the motor 14 to regulate the relative position of the magnets 10, 35 11, which operation can be carried out by means of a mechanism manual operation, such as a knob or knob. The two pieces 10, 11 of the magnetic element could also consist of a magnet and a metal block that can interact magnetically with the magnet, for example, iron. 5 Finally, although an embodiment of the force application device designed to bend mirrors, especially mirrors used in particle accelerators, has been described, the device of the present invention may also consist of another type of force application device usable in other fields, 10 for example, in the assembly and placement of parts. Analysis The force applied by the swing arm 2 in the mirror 5 (FA) is given by the following expression: (one) In this case, Fs and Fm are the forces made by the elastic element 20 and by the magnetic element 10, 11, respectively. rS, rm and rA are the distances of the points of application of these forces with respect to the joint 3. For simplicity, it has been considered that all the forces are parallel to each other (vertical) and orthogonal with respect to the swing arm 2 , and that the application points are aligned on the horizontal line defined by the articulation 25 3. In figure 3 the sign convention used in the equation can be observed. Because rS and Fs are negative, their product is positive and, because rA is positive, the resulting force contribution from spring 6 to mirror 5 is positive. The same applies in the case of the magnetic element 10, 11. The force exerted by the spring 6 is proportional to the stretching of the spring 6. This can be represented as (2) In this case, LS is the resting length of the spring 6 measured from its union to the swing arm 2 to its union to the nut 7. The force made by the magnetic element 10, 11 is inversely proportional to a power of the distance between the two magnets 10, 11 (d). The concrete exponent depends on the geometry of the magnet 10, 11. However, with a diameter much larger than the distance between the magnets, the exponent is close to one. Therefore, force can be expressed as Fmax and dm are constants that parameterize the dependence of the force with respect to distance. Fmax is the maximum force made by the magnetic element 10, 11 (with a separation between magnets equal to zero) and dm is the distance between magnets for which the force has decreased to half of the maximum force. The expression is valid only for distances between positive magnets. In this case, Fm is negative according to the sign convention shown in Figure 3. An example of values for Fmax and dm is 8N and 0.5 mm, respectively, corresponding to disc-shaped magnets with a diameter of 15 mm, 1 mm high and an N35 magnetization (manufactured by the Supermagnete company). twenty Description as a spring of the magnetic element To describe the stabilization mechanism in detail, it is worth expressing the magnetic force in terms of an elastic constant. This can be carried out in a small region, using Taylor's first-order expansion of the magnetic force as follows: 30 This equation can be represented more compactly as: (3) where 35 Y km has elastic constant units and, unlike elastic systems, it adopts negative values. Adjustment is possible by properly selecting the point d0 between and zero. image 1 5 Force stability By combining the expressions (1), (2) and (3) it is possible to write the total force as 10 In this case, the distance between the magnets has been expressed as a function of the coordinates of their ends, as can be seen in Figure 3. It is possible to arrange the terms as follows: The expression has four main terms, which express the dependence with respect to zA, zS and zm, being able to observe that the dependence with 20 with respect to zA disappears to When this condition is met, the force exerted by the drive device 25 does not depend on the position of the contact point. This is equivalent to a system with zero rigidity. Substituting km for its explicit expression, it is possible to find the separation between magnets that produces this condition 30 In this case, there is only one valid solution if d0 is positive. For this, the following condition must be met: This condition essentially means that the maximum equivalent stiffness of the magnetic element must be as large as the stiffness of the spring. The distance between the magnets can be adjusted by adjusting the position of the magnet 11 attached to the nut 12, that is, zm. The system includes a dedicated mechanism 12, 13, 14 for carrying out this adjustment (as described above). The adjustment of zm affects the total force applied by the drive device. Force adjustment Once the separation between the magnets 10, 11 has been adjusted to cancel the dependence with respect to the force zA, it is possible to adjust the total force of the actuating device by adjusting the stretching of the spring 6. As described above, this It is carried out by moving the lower end of the spring (zS). It should be noted that adjusting zS does not change the balance between the elastic constants of the spring 6 and the magnetic element 10, 11, so that the stability of the force is preserved throughout the range of available forces by the drive device. Stabilization interval 25 The spring-like approach of the magnetic element is valid within a small region around d0, the error of the approximation being dominated by the quadratic term of the corresponding Taylor series. 30 That, after some manipulations, it can be expressed as: In this way, the error increases more rapidly when the magnetic force necessary to compensate for the elastic constant approaches its maximum value. The validity range for a given threshold is: 5 The first factor is the characteristic length of the magnets, the longer it is, the softer the decrease of the field with the distance. The second term is the relationship between the elastic constant and the maximum value of force that can be obtained with the magnets. It indicates that, in order to obtain a wide stabilization interval, the spring should be weak compared to the magnetic element. Finally, the third term is simply the relationship between force tolerance and the force contribution of the spring. fifteen In short, it is necessary to use strong magnets and use their weak part of the field to obtain a large stability interval.
权利要求:
Claims (12) [1] 1. Force application device on an object (5), comprising: -a force application element (2) for contacting an area (P) of the object (5); 5 - an elastic element (6) associated with said force application element (2), causing the deformation of said elastic element (6) creating a first force proportional to said deformation and which is applied in said element (2) of force application; 10 characterized by the fact that it also comprises: - a magnetic element (10, 11) associated with said force application element (2), said magnetic element including at least two parts (10, 11) that interact magnetically with each other, causing said interaction the creation of a second force which is applied in the force application element (2); and wherein the force application element (2) is mobile in response to a variation in the position of the point of contact (P) between said force application element (2) and the object (5), causing said movement the deformation of the elastic element (6) and the modification of the interaction between said at least two parts (10, 11) of the magnetic element, so that an increase in the first force corresponds to a decrease in the second force and a decrease of the first force corresponds to an increase of the second force. 25 [2] 2. Device according to claim 1, characterized in that the elastic element is a helical spring (6) that works under tension. [3] Device according to any one of the preceding claims, characterized in that the at least two parts that interact magnetically with each other comprise a pair of magnets (10, 11) movable with each other and arranged in mutual attraction. [4] 4. Device according to claim 3, characterized in that that the movement of the force application element (2) in one direction causes the spring (6) to stretch and the distance between the pair of magnets (10, 11) and the movement of the force application element (2) in direction opposite causes the contraction of the spring (6) and the approach between the pair of magnets (10, 11). 5 [5] Device according to any of the preceding claims, characterized in that the force application element is a swing arm (2) comprising two ends on each side of an articulation point (3), said arm being in contact. (2) with the object (5) by one end 10 (4) and being connected to the elastic element (6) and the magnetic element (10, 11) by the opposite end. [6] Device according to any one of the preceding claims, characterized in that it comprises means (7, 8, 9) of controlled deformation of the elastic element (6). [7] Device according to any of the preceding claims, characterized in that it comprises means (12, 13, 14) for adjusting the mutual position between the at least two parts (10, 11) that interact magnetically with each other. [8] 8. Method of applying force on an object (5), comprising: - arranging a force application element (2) to contact a zone (P) 25 of the object (5); - disposing an elastic element (6) associated with said force application element (2), causing the deformation of said elastic element (6) creating a first force proportional to said deformation and which is applied in said element (2) ) force application; characterized by the fact that it also comprises: - arranging a magnetic element (10, 11) associated with said force application element (2), said magnetic element including at least two parts (10, 11) that interact magnetically with each other, said interaction causing the creation of a second force that is applied in the force application element (2); and modifying the interaction between said at least two parts (10, 11) of the magnetic element 5 in correspondence with a deformation of the elastic element (6) due to the movement of the force application element (2) caused by a variation of the position of the point (P) of contact between the force application element (2) and the object (5), so that an increase in the first force corresponds to a decrease in the second force and a decrease in the first force is corresponds to an increase in the second force. [9] 9. Method according to claim 8, characterized in that the elastic element is a helical spring (6) that works in tension. fifteen [10] Method according to claim 8 or 9, characterized in that the at least two parts that interact magnetically with each other comprise a pair of magnets (10, 11) movable with each other and arranged in mutual attraction. [11] Method according to claim 10, characterized in that the movement of the force application element (2) in one direction causes the spring to be stretched (6) and the distance between the pair of magnets (10, 11) and the movement of the force application element (2) in the opposite direction causes the contraction of the spring (6) and the approach between the pair of magnets (10, 11). 25 [12] 12. Method according to any of claims 8 to 11, characterized in that the force application element is a swing arm (2) comprising two ends on each side of an articulation point (3), being in contact said arm (2) with the object (5) by one end 30 (4) and being connected to the elastic element (6) and the magnetic element (10, 11) by the opposite end.
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同族专利:
公开号 | 公开日 ES2603655B1|2017-09-25|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题 US20110267596A1|2008-12-11|2011-11-03|Carl Zeiss Smt Gmbh|Gravitation compensation for optical elements in projection exposure apparatuses| US20140016109A1|2011-05-06|2014-01-16|Carl Zeiss Smt Gmbh|Arrangement for actuating an element in a projection exposure apparatus| ES2552225A1|2015-05-27|2015-11-26|Consorci Per A La Construcció, Equipament I Explotació Del Laboratori De Llum De Sincrotró|Mirror bending device | CN104900293A|2015-06-04|2015-09-09|中国科学院上海应用物理研究所|Double-drive pressure roller type bending device|ES2751223A1|2019-07-24|2020-03-30|Consorci Per A La Construccio Equipament I Explotacio Del Laboratori De Llum De Sincrotro|MIRROR CURVATURE CORRECTION DEVICE |
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